Onto Innovation Inc. introduced its new Atlas G6 optical critical dimension (OCD) metrology system, designed to meet the stringent process control requirements of advanced semiconductor nodes. This platform is specifically engineered for second-generation gate-all-around (GAA) logic and future vertical gate DRAM architectures, which are essential for AI applications.
The Atlas G6 system delivers enhanced signal sensitivity, a smaller spot size, and advanced precision, addressing the challenge of structural dimensions shrinking by up to 30% per generation. These capabilities enable accurate nanowire measurements in GAA devices and direct on-device measurements in smaller DRAM cell blocks for high bandwidth memory (HBM).
The new system's ability to provide precise control of individual nanowires in GAA devices is critical for achieving higher transistor speeds and lower power consumption targets. Onto Innovation has already secured multiple production orders for the Atlas G6 system from leading logic and memory manufacturers, demonstrating immediate market acceptance and demand.
The content on BeyondSPX is for informational purposes only and should not be construed as financial or investment advice. We are not financial advisors. Consult with a qualified professional before making any investment decisions. Any actions you take based on information from this site are solely at your own risk.