Thermo Fisher Scientific Inc. announced the launch of the Thermo Scientific Vulcan™ Automated Lab, a groundbreaking solution designed to revolutionize process development and control in semiconductor manufacturing. This seamlessly integrated system aims to enhance productivity, increase yield, and reduce operating costs for semiconductor manufacturers.
The Vulcan Automated Lab addresses the unprecedented demand for atomic-scale transmission electron microscopy (TEM) metrology data driven by the rapid evolution and miniaturization of semiconductor technology. It integrates robotic handling with artificial intelligence-enhanced instruments for semiconductor analysis, enabling consistent and efficient standards for TEM metrology workflows.
This innovative solution delivers high-volume data of exceptional quality while reducing operator burden and addressing the time-to-data gap from traditional TEM analysis methods. By streamlining metrology data collection through automation and data connectivity, the Vulcan Automated Lab accelerates the process and creates an integrated workflow between the semiconductor lab and the fabrication facility, and is now commercially available.
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